Yasser Mafinejad - School of Engineering , Deakin University, Geelong, VIC ۳۲۱۶, Australia,
Majid Zarghami - MEMS and RF MEMS Research Group, School of Electrical and Computer Engineering, Sadjad Institute
Abbas Z. Kouzani
Khalil Mafinezhad

Carbon materials such as Graphene and carbon nano tube promise a new generation of RF NEMS devices that bring many advantages due to their very high performances such as low mass, high Young’s modulus and electrical conductivity. In this paper, the properties of Graphene for RF M/NEMS applications are briefly described. We compare the mechanical behaviour of Graphene switches with metallic RF MEMS switches such as Aluminium and Gold. The analytical study and simulation results show that the actuation voltage of Al and Au switches is high (35 V) whereas the actuation voltage for the Graphene switch is low (7.7 V). Also, the switching time of Graphene switch is 3.5 ns while the switching time for metallic switches is approximately 17μs

Graphene, RF MEMS, NEMS, actuation voltage, switching time