Design and Simulation of Micro-Cantilever Sensor with Higher Measurement Accuracy and Sensitivity
عنوان مقاله: Design and Simulation of Micro-Cantilever Sensor with Higher Measurement Accuracy and Sensitivity
شناسه ملی مقاله: ICESCON03_199
منتشر شده در سومین کنفرانس بین المللی علوم و مهندسی در سال 1395
شناسه ملی مقاله: ICESCON03_199
منتشر شده در سومین کنفرانس بین المللی علوم و مهندسی در سال 1395
مشخصات نویسندگان مقاله:
Soheila Elmi - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
Manuchehr Bahrami - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
Majid Ghasemi - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
خلاصه مقاله:
Soheila Elmi - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
Manuchehr Bahrami - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
Majid Ghasemi - Electrical and Computer Engineering faculty, Tabriz University, Tabriz, Iran
Micro-cantilevers (MCLs) are one of the basic micro-mechanical structures. They are fixed at one ends and the other can easily move. In these sensors, one surface of the MCL is coated with antibodies, proteins or other bio-receptors. In this paper, a surface stress ofwas applied to the top surface of the cantilevers. By fixing one of the dimensional parameters and altering the ratio of others, effect of the applied force on the resonance frequency of the MCL and the changes in sensitivity and Q factor are observed. Then, influences of different shaped holes on the sensitivity, Q factor, bandwidth and deflection are indicated. At the end,we proposed a new design of micro-cantilever that improved sensitivity, Q factor, bandwidth and deflection of it.
کلمات کلیدی: micro-cantilever, biosensor, resonance frequency
صفحه اختصاصی مقاله و دریافت فایل کامل: https://civilica.com/doc/491644/