atefeh Gholipour - Ph. D. Student,Department of Electrical Engineering, Ferdowsi university of Mashhad, Mashhad, Iran
khalil Mafinezhad - Professor , Department of Electrical Engineering, Ferdowsi university of Mashhad, Mashhad, Iran and Sadjad institute of higher education

In the last decade Micromechanical components for communication applications has been fabricated via IC-compatible MEMS technologies. In fact, its most important impact is not at the component level, but rather at the system level, by offering alternative transceiver architectures that reduce power consumption and enhance performance. In this paper a mixer-filter for AM frequency receiver with MEMS based on one clamped-clamped beamresonator is presented. Mixing and filtering functions are achieved by one component. By combining mixer and filter in one component, in addition to size reduction for portable communication devices, power consumption is alsoreduced. Mixer-filter can down-convert the RF frequency of 1.655MHzto IF frequency of 455 kHz with a bandwidth of 8 kHz bylocal oscillator frequency of 2.11 MHz. This technique canbe used for much higherRF frequencies. The unloaded Q of this device is 7714 and it could be used as narrow band filter, this design has high linearity too with IIP3 13.6dBm. Above all, by integrating this mixer filter with the rest of the circuit it is more economical than other conventional receivers.

Micromechanical MEMS, resonator,quality factor, IC compatible fabrication, mechanical coupling, Clamped-Clamped beam