Modelling the Size Effects of the Sensing Element on pressre sensor Measurement Accuracy

This work describes a miniaturized implantable passive pressure sensor for pressuremeasurement. The sensor device consists of a capacitor array and a coil inductor. Thecapacitor array, which is also membrane structures, is fabricated by surfacemicromachining technique. The deflection of the membrane depends on the pressureapplied on it. The higher the pressure, the larger the deflection, and the larger thecapacitor is. This project provides detailed solutions for passive pressure sensormodeling, and measurement by using The Method of Moments (MOM) algorithmthat provides a fast and accurate way to calculate the capacitance of membranestructures with any deformation (pressure), and this aproaches causes to reduce thesize of Sensing Element and therefore the sensor itself can be designed smaller thanmost of the publication work in this area, and can be implanted into the humanbody. This sensor was particularly designed for intraocular pressure (IOP)measurement and it is very useful for glaucoma diagnosis. It can also be implantedinto any other part of human body to remotely measure any pressure of a tissue orinside a chamber, e.g. the pulmonary artery.